Iterative assembly of ^171Yb atom arrays with cavity-enhanced optical lattices

Assembling and maintaining large arrays of individually addressable atoms isa key requirement for continued scaling of neutral-atom-based quantum computersand simulators. In this work, we demonstrate a new paradigm for assembly ofatomic arrays, based on a synergistic combination of optical tweezers andcavity-enhanced optical lattices, and the incremental filling of a target arrayfrom a repetitively filled reservoir. In this protocol, the tweezers providemicroscopic rearrangement of atoms, while the cavity-enhanced lattices enablethe creation of large numbers of optical traps with sufficient depth for rapidlow-loss imaging of atoms. We apply this protocol to demonstratenear-deterministic filling (99

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